Silicon Technology and its Applications in Microelectronics

  • Shou-jue Wang


In recent years the progress in LSI (Laser Stimulated Implanation) and VLSI has brought about great advances in the field of electronics and there has been a tremendous growth of their industrial production and scientific research (see Figure 1). The main source of these achievements is the steady improvement in the basic silicon technology.


Thermal Grown Oxide Dopant Atom Full Adder Laser Annealing Silicon Technology 
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Copyright information

© Plenum Press, New York 1983

Authors and Affiliations

  • Shou-jue Wang
    • 1
  1. 1.Computer Science Institute of SemiconductorsChinese Academy of SciencesChina

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