Imaging Techniques for Acoustic Microscopy of Microelectronic Circuits

  • R. L. Hollis
  • R. Hammer
Part of the Acoustical Imaging book series (ACIM, volume 10)

Abstract

Following the work of Lemons and Quate1, an 800 MHz acoustic microscope has been constructed, operating in the reflection mode for examination of microelectronic materials and devices. To aid in the interpretation of the acoustic images, a method has been developed which produces false color acoustic micrographs of high quality. This technique, along with derivative and logarithmic processing is applied to the acoustic examination of plated structures on organic/ceramic substrates. A standard optical microscope is operated in tandem with the acoustic microscope to allow convenient and absolute comparison between the optical and acoustic images.

Keywords

Microwave Expense Gallium Polyimide Acoustics 

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References

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Copyright information

© Plenum Press, New York 1982

Authors and Affiliations

  • R. L. Hollis
    • 1
  • R. Hammer
    • 1
  1. 1.IBM Thomas J. Watson Research CenterYorktown HeightsUSA

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