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Residual Defects in Laser Annealed Si

  • A. Goltzené
  • C. Schwab
  • J. C. Muller
  • P. Siffert

Abstract

EPR and photocarrier cyclotron resonance investigations have been performed on laser annealed Si wafers.

Keywords

Cyclotron Resonance Electron Paramagnetic Resonance Signal Electron Cyclotron Resonance Deep Level Transient Spectroscopy Electron Paramagnetic Resonance Line 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer Science+Business Media New York 1981

Authors and Affiliations

  • A. Goltzené
    • 1
  • C. Schwab
    • 1
  • J. C. Muller
    • 2
  • P. Siffert
    • 2
  1. 1.Laboratoire de Spectroscopie et d’Optique du Corps Solide, Associé au C.N.R.S. n° 232Université Louis PasteurStrasbourgFrance
  2. 2.Groupe de Physique et Applications des Semiconducteurs (PHASE)Centre de Recherches NucléairesStrasbourg CedexFrance

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