Advertisement

Techniques to Obtain Atomically Clean Surfaces

  • J. Verhoeven

Abstract

In this paper techniques for preparing atomically clean surfaces are reviewed. The advantages and disadvantages of several methods are discussed. A combination of techniques is needed to obtain proper results in many cases. Bulk impurities play an important role.

Keywords

Bulk Impurity Nickel Surface Electron Bombardment Electron Stimulate Desorption Trichlor Ethylene 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

Preview

Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.

References

  1. 1.
    W. Turkenburg, Ph.D. Thesis, University of Amsterdam (1976).Google Scholar
  2. 2.
    J.F. van der Veen, R.G. Smeenk, R.M. Tromp and F.W. Saris, Surface Sci. 79, 212 (1974).CrossRefGoogle Scholar
  3. 3.
    H.E. Farnsworth, DAGV-Symposium, Moderne Verfahren der Oberflächenanalyse (1972).Google Scholar
  4. 4.
    S.M. Bedair and H.P. Smith, J.Appl.Phys. 40, 4776 (1969).CrossRefGoogle Scholar
  5. 5.
    R. Gautier, P. Pinard and F. Devaine, Vide 24, 140, 109 (1969).Google Scholar
  6. 6.
    L. Bakker, Ph.D. Thesis, Technical University Delft (1972).Google Scholar
  7. 7.
    E.N. Sickafus, Surface Sci. 19, 181 (1970).CrossRefGoogle Scholar
  8. 8.
    S. Mroz, C. Koziol and J. Kolaczkiewicz, Vacuum 26, 61 (1975).CrossRefGoogle Scholar
  9. 9.
    F.C. Schouten, D.L.J. Gijzeman and G.A. Bootsma, Nederl. Tijd-schr. v. Vacuum Techn. 15m 46 (1977).Google Scholar
  10. 9a.
    F.C. Schouten, E. te Brake, O.L.J. Gijzeman and G.A. Bootsma, Surface Sci., to be published.Google Scholar
  11. 10.
    J. Lupujoulade and K. Neil, J.Chem.Phys. 57, 3535 (1972).CrossRefGoogle Scholar
  12. 11.
    Y. Margoninsky, D. Segal and R.E. Kirby, Surface Sci. 51, 488 (1975).CrossRefGoogle Scholar
  13. 12.
    Y. Margoninsky, J.Appl.Phys. 47, 3868 (1976).CrossRefGoogle Scholar
  14. 13.
    J. Verhoeven and J. Los, Surface Sci. 58, 566 (1976).CrossRefGoogle Scholar
  15. 14.
    J. Verhoeven, in: “Proceedings 7th Intern. Vacuum Congres and the 3rd Conference on Solid Surfaces” pp. 915, Vienna (1977).Google Scholar
  16. 15.
    J.P. Coad, H.E. Bishop and J.C. Rivière, Surface Sci. 21, 253 (1970).CrossRefGoogle Scholar
  17. 16.
    J. Verhoeven and J. Los, to be published.Google Scholar
  18. 17.
    G.A. Bootsma, personal communications.Google Scholar
  19. 18.
    Mahboob Khan and Juergen M. Schroeer, Rev.Sci.Instrum. 42, 1348 (1971).CrossRefGoogle Scholar
  20. 19.
    J. Franks and A.M. Chandler, Vacuum 24, 489 (1974).CrossRefGoogle Scholar
  21. 20.
    A.M. Chandler and R.K. Fitch, Vacuum 24, 483 (1974).CrossRefGoogle Scholar
  22. 21.
    J.W. Coburn, J.Vac.Sci.Technol. 13, 1037 (1976).CrossRefGoogle Scholar
  23. 22.
    E. Taglauer, U. Beitat, G. Marin and W. Heiland, Nuclear Materials 63, 193 (1976).CrossRefGoogle Scholar
  24. 23.
    T. Smith, Surface Sci. 27, 45 (1971).CrossRefGoogle Scholar
  25. 24.
    J.A. McHugh, Radiat. Eff. 18, 211 (1973).CrossRefGoogle Scholar
  26. 25.
    P. Staib, Radiat. Eff. 18, 217 (1973).CrossRefGoogle Scholar
  27. 26.
    J. Kistemaker and H.E. Roosendaal, Jpn. J. Appl. Phys. Suppl. 2, Pt.Z. 571 (1974).Google Scholar
  28. 27.
    W.T. Ogar, N.T. Olson and H.P. Smith, J.Appl.Phys. 40, 4997 (1969).CrossRefGoogle Scholar
  29. 28.
    H.L. Hughes, R.D. Baxter and B.R. Phillips, IEEE Trans.Nuel. Sci. NS-19, 6, 256 (1972).CrossRefGoogle Scholar
  30. 29.
    H. Shimizu, M. Ono and K. Nahayama, J.App.Phys. 46, 460 (1975).CrossRefGoogle Scholar
  31. 30.
    C.G. Pantano, D.B. Dove and G.Y. Onoda, J.Vac.Sci.Technol. 13, 414 (1976).CrossRefGoogle Scholar
  32. 31.
    S. Sayyid and E.M. Williams, Surface Sci. 62, 431 (1977).CrossRefGoogle Scholar
  33. 32.
    T.E. Madey and J.T. Yates, J.Vac.Sci.Technol. 8, 525 (1971).CrossRefGoogle Scholar
  34. 33.
    T.E. Madey, Surface Sci. 36, 281 (1973).CrossRefGoogle Scholar
  35. 34.
    J. Anderson and P.J. Estrup, Surface Sci. 9, 463 (1968).CrossRefGoogle Scholar
  36. 35.
    J.P. Coad, M. Gettings and J.C. Rivières, internal report, AERE, Harwell, Oxfordshire, England.Google Scholar
  37. 36.
    D. Menzel, P. Kronauer and W. Jeland, Ber.Bunsenges.Phys.Chem. 75, 1074 (1971).Google Scholar
  38. 37.
    R. Franchy and D. Menzel, in: “Proc.7th Intern. Vac. Congr. and 3rd Intern. Conf. Solid Surf.”, pp. 1209, Vienna (1977).Google Scholar
  39. 38.
    S. Baydyavoy, W.R. Bottoms and P. Mark, Surface Sci. 28, 517 (1971).CrossRefGoogle Scholar
  40. 39.
    G.W. Gobeli and F.G. Allen, J.Phys.Chem.Solids 14, 23 (1960).CrossRefGoogle Scholar
  41. 40.
    J.C. Rivière, personal communication.Google Scholar
  42. 41.
    E.V. Kornelsen, J.Vac.Sci.Technol. 13, 716 (1976).CrossRefGoogle Scholar
  43. 42.
    M. Menyhárd, Nederl. Tijdschr. v. Vacuumtechniek 16, 220 (1978).Google Scholar
  44. 42.
    M. Menyhárd, personal communication.Google Scholar
  45. 43.
    W. Ranke, J.Phys. D 11, L37 (1978).CrossRefGoogle Scholar

Copyright information

© Plenum Press, New York 1979

Authors and Affiliations

  • J. Verhoeven
    • 1
  1. 1.FOM-Institute for Atomic and Molecular PhysicsAmsterdam/Wgm.The Netherlands

Personalised recommendations