Surface Cleaning by Low-Temperature Bombardment with Hydrogen Particles: An AES Investigation on Copper and Fe-Cr-Ni Steel Surfaces

  • R. Bouwman
  • J. B. van Mechelen
  • A. A. Holscher


Hydrogen has been used at a pressure of 6.6 × 10–3 Pa and at room temperature in an ion-etching beam mode” for cleaning solid surfaces. Two systems, viz. solvent-cleaned and atmosphere-exposed copper and heat-resistant Fe-Cr-Ni steel, were analyzed by Auger spectroscopy before and after bombardment with hydrogen particles produced in a conventional ion gun. Copper is almost completely cleaned of carbon, sulfur, and oxygen within 30 min. A bulk-carbon-containing steel is completely freed from surface carbon while the bulk carbon is preserved in the subsurface zone at a satisfactory level. The proposed cleaning method seems to be very surface specific and nondestructive to subsurface layers.


Plasma Etching Ultrahigh Vacuum Auger Spectrum Surface Cleaning Auger Spectroscopy 
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Copyright information

© Plenum Press, New York 1979

Authors and Affiliations

  • R. Bouwman
    • 1
  • J. B. van Mechelen
    • 1
  • A. A. Holscher
    • 1
  1. 1.Koninklijke/Shell-LaboratoriumAmsterdam (Shell Research B.V.)The Netherlands

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