Abstract
Surface cleaning is achieved by various techniques; such as washing with solvents, thermal heating, and ion bombardment. No one method has the desired features of simplicity, low cost, and effectiveness. Each has its range of applicability. Solvent cleaning has the greatest range of utility but is inadequate in many cases, particularly where the solvents themselves are contaminates. Thermal heating is useful up to the temperature limits of the surfaces to be cleaned. Ion bombardment with plasmas provide a method of cleaning where contaminant bond strengths exceed the temperature limits of the system. The plasma energy can be much higher than that achieved thermally, yet not damage surfaces because of the low thermal flux. The current techniques used in surface cleaning, their application and limitations, and the potential for future developments are reviewed. Emphasis is placed on plasma cleaning because of its versatility and its potential for cleaning of high bonding energy contaminants.
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© 1979 Plenum Press, New York
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Balwanz, W.W. (1979). Plasma Cleaning of Surfaces. In: Mittal, K.L. (eds) Surface Contamination. Springer, Boston, MA. https://doi.org/10.1007/978-1-4684-3506-1_17
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DOI: https://doi.org/10.1007/978-1-4684-3506-1_17
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