Surface Cleaning in Thin Film Technology

  • D. M. Mattox


As a practical matter, a “clean surface” is one that contains no significant amounts of undesirable material. In some cases, such as the adhesion of deposited thin films, foreign material on the surface may be desirable or necessary. Adhesion is often equated to surface cleanliness,+ so surface treatments or the deliberate addition of foreign material which improves adhesion may be considered cleaning techniques.


Cleaning Procedure Thin Film Technology Cleaning Technique Plasma Cleaning Clean Metal Surface 


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Copyright information

© Plenum Press, New York 1979

Authors and Affiliations

  • D. M. Mattox
    • 1
  1. 1.Sandia LaboratoriesAlbuquerqueUSA

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