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Surface Cleaning in Thin Film Technology

  • D. M. Mattox

Abstract

As a practical matter, a “clean surface” is one that contains no significant amounts of undesirable material. In some cases, such as the adhesion of deposited thin films, foreign material on the surface may be desirable or necessary. Adhesion is often equated to surface cleanliness,+ so surface treatments or the deliberate addition of foreign material which improves adhesion may be considered cleaning techniques.

Keywords

Cleaning Procedure Thin Film Technology Cleaning Technique Plasma Cleaning Clean Metal Surface 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Plenum Press, New York 1979

Authors and Affiliations

  • D. M. Mattox
    • 1
  1. 1.Sandia LaboratoriesAlbuquerqueUSA

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