Abstract
As a practical matter, a “clean surface” is one that contains no significant amounts of undesirable material. In some cases, such as the adhesion of deposited thin films, foreign material on the surface may be desirable or necessary. Adhesion is often equated to surface cleanliness,+ so surface treatments or the deliberate addition of foreign material which improves adhesion may be considered cleaning techniques.
Work supported by the U. S. Department of Energy
This is an abbreviated version of the full paper published in Thin Solid Films 53, 81–96 (1978).
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© 1979 Plenum Press, New York
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Mattox, D.M. (1979). Surface Cleaning in Thin Film Technology. In: Mittal, K.L. (eds) Surface Contamination. Springer, Boston, MA. https://doi.org/10.1007/978-1-4684-3506-1_15
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DOI: https://doi.org/10.1007/978-1-4684-3506-1_15
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