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Thermal Gradient Deposition of SiC Diffusion Tracers

  • R. F. Davis
  • J. D. Hong
  • M. Hon
Part of the Materials Science Research book series (MSR, volume 11)

Abstract

The periodic desire for high temperature and/or corrosion resistant semiconductor devices has invariably caused considerable attention to be focused on α- and β-SiC. However, the favorable properties of refractoriness and chemical inertness also introduce difficulties in fabrication. As such, numerous techniques including sublimation, chemical vapor deposition, sputtering and the several forms of liquid phase epitaxy (LPE) have been used in an attempt to form defect-free crystals and devices (see selected papers in ref. 1–3).

Keywords

Liquid Phase Epitaxy Seed Crystal Covalent Compound Thermal Neutron Activation Analysis Solvent Zone 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Plenum Press, New York 1978

Authors and Affiliations

  • R. F. Davis
    • 1
  • J. D. Hong
    • 1
  • M. Hon
    • 1
  1. 1.North Carolina State UniversityRaleighUSA

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