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Physical Properties of Sputtered Amorphous Germanium Thin Films: The Role of Technological Parameters

  • M. Závětová
  • S. Koc
  • J. Zemek

Abstract

The role of technological parameters — decomposition rate, annealing, dopings working gas purity — in the electrical and optical properties of sputtered a-Ge layers was studied

Keywords

Deposition Rate Decomposition Rate Absorption Edge Technological Parameter Spectral Dependence 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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References

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    S.C. Moss, D. Adler, Comments on Sol. St. Physics 5, 47 (1973).Google Scholar
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    D. Adler, S.C. Moss, Comments on Sol. St. Physics. 5 63 (1973).Google Scholar
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    S. Koc, M. ZavStovci, J. Zemek, Thin Solid Films 10 165 (1972).CrossRefGoogle Scholar
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    M.H. Brodsky, R.S. Title, K. Weiser, G.D. Pettit, Phys. Rev. B1 2632 (1970).CrossRefGoogle Scholar
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    O. Renner, Thin Solid Films 12 S 43 (1972).CrossRefGoogle Scholar
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    M. ZavStova, S. Koc, J. Zemek, Czech J. Phys. B22 429 (1972).Google Scholar

Copyright information

© Plenum Press, New York 1974

Authors and Affiliations

  • M. Závětová
    • 1
  • S. Koc
    • 1
  • J. Zemek
    • 1
  1. 1.Institute of Solid State PhysicsCzechoslovak Academy of SciencePragueCzech Republic

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