Physical Properties of Sputtered Amorphous Germanium Thin Films: The Role of Technological Parameters
The role of technological parameters — decomposition rate, annealing, dopings working gas purity — in the electrical and optical properties of sputtered a-Ge layers was studied
KeywordsDeposition Rate Decomposition Rate Absorption Edge Technological Parameter Spectral Dependence
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© Plenum Press, New York 1974