Physical Properties of Sputtered Amorphous Germanium Thin Films: The Role of Technological Parameters

  • M. Závětová
  • S. Koc
  • J. Zemek


The role of technological parameters — decomposition rate, annealing, dopings working gas purity — in the electrical and optical properties of sputtered a-Ge layers was studied


Deposition Rate Decomposition Rate Absorption Edge Technological Parameter Spectral Dependence 
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Copyright information

© Plenum Press, New York 1974

Authors and Affiliations

  • M. Závětová
    • 1
  • S. Koc
    • 1
  • J. Zemek
    • 1
  1. 1.Institute of Solid State PhysicsCzechoslovak Academy of SciencePragueCzech Republic

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