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Scanning Electron Microscopy

  • Theodore George Rochow
  • Eugene George Rochow

Abstract

In a scanning electron microscope (SEM) the image is formed in a cathode-ray tube synchronized with an electron probe as it scans the surface of an object.(1) The resulting signals are secondary electrons, backscattered electrons, characteristic x-rays, Auger electrons,* and photons of various energies (Figure 13.1).(2)

Keywords

Diatomaceous Earth Backscatter Electron Auger Electron Chromatic Aberration Discrete Energy Level 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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References for Chapter 13

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Copyright information

© Plenum Press, New York 1978

Authors and Affiliations

  • Theodore George Rochow
    • 1
  • Eugene George Rochow
    • 2
  1. 1.North Carolina State University at RaleighRaleighUSA
  2. 2.Harvard UniversityCambridgeUSA

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