Compensating Layers in GaAs by Ion Implantation: Application to Integrated Optics
We show that the compensation in 0+ ions implanted GaAs is of two different origins: implantation induced defects and implanted oxygen atomso We give a few examples of optical waveguides in near IR region realized by H+ implantation and we discuss the using 0+ implanted layers to realize light guides as the compensation at high anneal temperatures is stable.
KeywordsHigh Anneal Temperature Optical Waveguide Light Guide Removal Ratio Carrier Concentration Profile
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