Backscattering and ESR Studies in Heavily Damaged Layer

  • Kohzoh Masuda


Two important technologies (Backscattering and ESR) in measurements of physical properties in implanted material are noticed as complementary technologies.

A typical feature of ESR of the amorphous centers is described and inhomogeneous character which was found recently by microwave frequency dependence at low temperature in spin system is mentioned.


Line Width Spin System Unpaired Electron Amorphous Layer Implantation Dose 


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Copyright information

© Plenum Press, New York 1975

Authors and Affiliations

  • Kohzoh Masuda
    • 1
  1. 1.Faculty of Engineering ScienceOsaka UniversityToyonaka, OsakaJapan

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