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Techniques for Studying Ion Implantation In Diamond

  • J. F. Morhange
  • R. Beserman
  • J. C. Bourgoin
  • P. R. Brosious
  • Y. H. Lee
  • L. J. Cheng
  • J. W. Corbett

Abstract

Measurements using electron paramagnetic resonance, optical absorption, Raman scattering and luminescence have been performed in ion implanted type IIa diamonds. Results are described which show how these techniques can be used to monitor the total amount of damage as well as the behaviour of point defects introduced by implantation.

Keywords

Electron Paramagnetic Resonance Optical Absorption Point Defect Raman Scattering Isotropic Line 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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References

  1. 1.
    G. K. Walters and T. L. Estle, J. Appl. Phys. 32, 1854 (1961).ADSCrossRefGoogle Scholar
  2. 2.
    P. R. Brosious, J. W. Corbett and J. C. Bourgoin, Phys. Stat. Sol. (a) 21, 677 (1974).ADSCrossRefGoogle Scholar
  3. 3.
    C.D. Clark and E. W. J. Mitchell, Rad. Effects 9, 219 (1971).ADSCrossRefGoogle Scholar
  4. 4.
    J. F. Morhange, R. Beserman and J. C. Bourgoin, (to be published).Google Scholar
  5. 5.
    P. J. Dean, Phys. Rev. 139, A588 (1965).ADSCrossRefGoogle Scholar

Copyright information

© Plenum Press, New York 1975

Authors and Affiliations

  • J. F. Morhange
    • 1
  • R. Beserman
    • 1
  • J. C. Bourgoin
    • 2
  • P. R. Brosious
    • 3
  • Y. H. Lee
    • 3
  • L. J. Cheng
    • 3
  • J. W. Corbett
    • 3
  1. 1.Laboratoire de Physique des SolidesUniversité Paris VIParis 5eFrance
  2. 2.Groupe de Physique des Solides de l’E.N.S.Université Paris VIIParis 5eFrance
  3. 3.Department of PhysicsState University of New York at AlbanyAlbanyUSA

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