Generation of Knock-Ons in Solids Bombarded with Energetic Ions and Energy Partition Relations
Theoretical considerations are given on the energy partition relation of collision sequences in solids bombarded with energetic ions, and a step by step method is proposed to calculate the statistically averaged total number of knock-on atoms. For assigning the initial energy of each knock-on atom, a basic equation governing radiation effects is modified to a simple integral form, and iterative numerical computations are carried out. The results suggest that a modification factor ξ for the Kinchin-Pease formula ((total knock-ons)=ξ·E n /2Ed) comes up to about 0.6, which is theoretically acceptable as a consequence employing a realistic (Thomas-Fermi) interaction potential. Approximations for reducing the computational burden and the accuracy of those results are discussed. Effects of the displacement threshold energy and the electronic stopping constant on the number of knock-ons and the energy partition relations are illustrated to be compared with experimental data.
KeywordsRadiation Effect Initial Energy Primary Process Ordinal Number Electronic Collision
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- 8.L. Eriksson, in Radiation Effects in Semiconductors ed. F. L. Vook, Plenum Press, New York (1968).Google Scholar
- 12.J. Lindhard et al., Mat. Fys. Medd. Dan. Vid. Selsk. 33 (1963).Google Scholar
- 15.For example, P. Sigmund discusses on this problem in ref. .Google Scholar
- 16.D. K. Brice, in Ion Implantation in Semiconductors and Other Materials ed. B. L. Crowder, Plenum Press, New York (1973).Google Scholar
- 19.F. H. Eisen et al., Int. Conf. Atomic Collision Phenomena in Solids, University of Sussex, (1969).Google Scholar