Transport of Ion Deposited Energy by Recoiling Target Atoms
A previous method for directly calculating the spatial distribution of energy deposition into damage or ionization for ions implanted into solid targets is extended to account for the energy transport by recoiling target atoms. The new calculations extend the applicability of the method to lower incident ion energies. Good agreement is obtained between experiment and theory using the improved procedure.
KeywordsEnergy Deposition Atomic Process Lower Energy Limit Spatial Moment Damage Energy
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