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Defect Production in Semiconductors

  • J. Bourgoin

Abstract

The different stages which govern the defect production are briefly described. Emphasis is placed on particular problems encountered in ion implantation such as the nature of the damage in highly disordered regions and the influence of the ionization on the damage production. Electronic mechanisms which can play a role in defect production and annihilation are discussed.

Keywords

Electron Paramagnetic reSonance Charge State Transmitted Energy Complex Defect Primary Defect 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Plenum Press, New York 1975

Authors and Affiliations

  • J. Bourgoin
    • 1
  1. 1.Laboratoire associé au CNRSGroupe de Physique des Solides de l’E.N.SParis Cedex 05France

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