Ion-Bombardment-Induced Surface Expansion of Solids
Surface expanding phenomena in GGG(Gd3Ga5O12) bombarded with various ions have been observed by an interferometer. An expansion model is proposed to explain the phenomena taking into account present and other investigators’ results. The effect of surface expansion on the profile of implanted ions in the substrate is discussed.
KeywordsSurface Elevation Step Height Surface Expansion Proton Bombardment Energy Bombardment
Unable to display preview. Download preview PDF.
- T. Tsurushima et al.; Proc. 5-th Conf. on Solid State Devices, Tokyo (1973) p.464Google Scholar