Deep Penetration of Implanted Po in CdS
The distribution of 25 KeV Po210 implanted into CdS platelets was determined by energy analyzing the α-particles emitted by Po210. Two samples were implanted along an axial channeling direction, and one along a planar channeling direction.
A new diffusion model was developed. The predicted distribution function as well as the distribution obtained from multistream diffusion theory were fitted to the experimental data. The present theory yielded a substantially better fit in the samples implanted along the axial channeling direction, in which there was measurable activity at a depth of 1μ. Both theories yielded comparable fits in the sample implanted along the planar channeling direction, in which there was measurable activity over a depth of 5000Å.
KeywordsResidual Activity Deep Penetration Native Defect Native Trap Experimental Energy Spectrum
Unable to display preview. Download preview PDF.
- 5.W.S. Johnson, J.F. Gibbons, Projected Range Statistics in Semiconductors (Stanford University Bookstore, Stanford, Calif., 1969).Google Scholar
- 6.H.H. Anderson, P. Sigmund, Mat. Fys. Medd. Dan. Vid. Selsk, 34, No. 15 (1966).Google Scholar
- 7.Handbood of Mathematical Functions, edited by M. Abramovitz and I.A. Stegun, National Bureau of Standards, Applied Mathematics Series 55 (U.S. GPO, Washington, D.C., 1964).Google Scholar
- 8.C.M. Lederer, J.M. Hollander and I. Perlman, Table of Isotopes (Wiley, New York, 1967).Google Scholar
- 9.G. Eldridge, P.K. Govind, D.A. Nieman and F. Chernow, Proceedings of the European Conference on Ion Implantation (Peter Peregrimes, Stevenage, Hertfordshire, England, 1970), p. 143.Google Scholar
- 11.B. Domeij, I. Bergstrom, J.A. Davies, J. Uhler, Arkiv Fysik 24, No. 29, 399 (1963).Google Scholar
- 12.G. Eldridge, Ph.D. Thesis (unpublished).Google Scholar