Implantation of Boron and Lithium in Semiconductors and Metals

  • J. P. Biersack
  • D. Fink


Range and damage profiles of implanted particles in semiconductors and metals are measured, and compared with theoretical predictions up to the 3rd moment of the distribution. Mobility of implanted atoms is studied during irradiation as well as after irradiation, for the observation of radiation enhanced diffusion and of normal diffusion.

Damage, range and diffusion profiles of implanted particles are measured by a method employing the neutron induced reactions 6Li(n,α)T and 10B(n,α)7 Li. From angular emission patterns also lattice positions of implanted atoms can be derived by means of channeling and blocking patterns.


Diffusion Profile Total Path Length Damage Profile Bethe Formula Boron Profile 


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Copyright information

© Plenum Press, New York 1975

Authors and Affiliations

  • J. P. Biersack
    • 1
  • D. Fink
    • 1
  1. 1.Hahn-Meitner-InstitutBerlin 39W.-Germany

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