Redistribution of Boron in Silicon Through High Temperature Proton Irradiation
The irradiation defects are usually assumed to act on impurity diffusion processes through an increase of the effective jump frequency, in a vacancy diffusion mechanism. We have shown that, at least for boron in silicon, the usual enhanced diffusion mechanism is swamped by another interaction mechanism, which causes depletion of impurity in some parts of the crystal, and accumulation elsewhere (1).
KeywordsBoron Atom Boron Concentration Irradiation Defect Proton Irradiation Substitutional Boron
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