Profiles; How Well Can Experimental Results be Explained by Theories ?

  • S. Furukawa
  • H. Ishiwara


This paper reviews the current status of theoretical and experimental investigations on the spatial distribution of implanted ions. The theoretical predictions show reasonably good agreement with the experimental results in both cases of uniform and double-layer substrates. Deformation of distributions due to secondary effects such as sputtering or expansion of the substrate is also discussed.


Lateral Spread Uniform Substrate Dose Implan Auger Electron Microscopy Recent Developement 


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Copyright information

© Plenum Press, New York 1975

Authors and Affiliations

  • S. Furukawa
    • 1
  • H. Ishiwara
    • 2
  1. 1.Res. Lab. of Precision Machinery and ElectronicsTokyo Institute of TechnologyTokyoJapan
  2. 2.Faculty of EngineeringTokyo Institute of TechnologyTokyoJapan

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