Abstract
This lecture dealt with various aspects of electron and ion beam microfabrication of prototype structures suitable for light guiding and coupling. The introductory material on electron and ion beam interactions with solid surfaces was not reproduced here because these subjects have been discussed extensively in the literature. The intent of these notes is to provide the reader with some of the more recent techniques and successes of beam micro-fabrication of integrated optics elements.
This is a preview of subscription content, log in via an institution.
Buying options
Tax calculation will be finalised at checkout
Purchases are for personal use only
Learn about institutional subscriptionsPreview
Unable to display preview. Download preview PDF.
References
F. S. Ozdemir, E. D. Wolf, and C. R. Bucky, “Computer-Controlled Scanning Electron Microscope System for High-Resolution Microelectronic Pattern Fabrication,” IEEE Transactions on Electron Devices ED-19, 624–628 (May 1972).
E. D. Wolf, F. S. Ozdemir, and R. D. Weglein, “Precision Electron Beam Microfabrication of Acoustic Surface Wave Devices,” Invited Paper (Jl), Presented at the 1973 IEEE Ultrasonics Symposium Monterey, California, Nov. 5–7, 1973.
More than 25 papers on electron beam systems and microfabrication applications are contained in the Proceedings of the 12th Symposium on Electron, Ion, and Laser Beam Technology, E. D. Wolf, Special ed., J. Vac. Sci. Technol. Vol 10, No. 6, Nov./Dec. 1973.
E. D. Wolf, F. S. Ozdemir, W. E. Perkins, and P. J. Coane, “Response of the Positive Electron Resist Elvacite 204l to Kilovolt Electron Beam Exposure,” in Rec. 11th Symp. Electron, Ion, and Laser Beam Technol., R. F. M. Thornley, ed., San Francisco, Calif., San Francisco Press, pp. 331–336, 1971.
M. Hatzakis, “Electron Resists for Microcircuit and Mask Production,” J. Electrochem. Soc. 110, 1033–1037 (1969).
D. B. Ostrowsky and J. C. DuBois, “Electron Beam Masking for Optical Waveguide Fabrication,” Digest of the Optical Society of America Topical Meeting on Integrated Circuits (Optical Society of America, Washington, D.C., 1972), p. MB7.
M. Hatzakis, S. Magdo and C. H. Ting, “Electron Beam Fabrication of Micron Transistors,” Proceedings of 4th International Conference Electron and Ion Beam Science and Technology, Los Angeles, California, May 1970, p. 524–530.
J. E. Goell, Digest of the Optical Society of America Topical Meeting on Integrated Circuits (Optical Society of America, Washington, D.C., 1972, p. MB8,
8a.J. E. Goell, R. D. Standley, “Ion Bombardment Fabrication of Optical Waveguides Using Electron Resist Masks,” Appl. Phys. Lett. 21, 72–73 (1972).
S. Somekh, E. Garmire, A. Yariv, H. L. Garvin, and R. G. Hunsperger, Appl. Phys. Lett. 22, 46 (1973).
H. L. Garvin, “High Resolution Fabrication by Means of Ion Beam Sputtering,” Paper Presented at Kodak Microelectronics Seminar, San Diego, Calif., December 11–12, 1972.
E. H. Hasseltine, F. C. Hurlbut, N. T. Olson, and H. P. Smith, “Cesium Ion Bombardment of Al2O3 in a Controlled Oxygen Environment,” J. Appl. Phys. 38, 4313 (1967).
M. Marcal, Thomson CSF, France, Private Communication.
The results reported here were obtained from work supported in part by the Naval Electronics Laboratory Center, Contract N00123–73-C-0231.
E. D. Wolf, “Computer-Controlled Electron Beam Microfabrication,” Invited Paper in Proceedings Seventh National Conference on Electron Probe Analysis, San Francisco, Calif., July 17–21, 1972, p. 24A-24B.
H. L. Garvin, E. Garmire, S. Somekh, H. Stoll, and A. Yariv, “Ion Beam Micromachining of Integrated Optics Components,” Appl. Optics 12, 455–459 (1973).
J. P. Auton, Appl. Opt. 6, 1023 (1967).
H. L. Garvin and J. E. Kiefer, “Wire-Grid Polarizers for 10.6 p.m. Radiation,” Digest of Technical Papers 1973 IEEE/IOA Conference on Laser Engineering and Applications, Washington, D.C., May 30-June 1, 1973, Paper 20.9 p. 100.
Author information
Authors and Affiliations
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 1974 University of California
About this chapter
Cite this chapter
Wolf, E.D. (1974). Electron and Ion Beam Microfabrication of Integrated Optic Elements. In: Barnoski, M.K. (eds) Introduction to Integrated Optics. Springer, Boston, MA. https://doi.org/10.1007/978-1-4684-2082-1_7
Download citation
DOI: https://doi.org/10.1007/978-1-4684-2082-1_7
Publisher Name: Springer, Boston, MA
Print ISBN: 978-1-4684-2084-5
Online ISBN: 978-1-4684-2082-1
eBook Packages: Springer Book Archive