Electron and Ion Beam Microfabrication of Integrated Optic Elements
This lecture dealt with various aspects of electron and ion beam microfabrication of prototype structures suitable for light guiding and coupling. The introductory material on electron and ion beam interactions with solid surfaces was not reproduced here because these subjects have been discussed extensively in the literature. The intent of these notes is to provide the reader with some of the more recent techniques and successes of beam micro-fabrication of integrated optics elements.
KeywordsElectron Beam Polymethyl Methacrylate Waveguide Structure Thin Film Material Electron Beam Exposure
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