Implantation and Diffusion of Au in Be: Behavior During Annealing of a Low-Solubility Implant

  • S. M. Myers
  • R. A. Langley


The behavior of implanted gold in single-crystal a-beryllium has been studied during annealing, under conditions where the local concentration of the implant was much greater than the solid solubility. Room temperature implants of ≃ 1.0 x 1017 Au atom/cm2 at 100 keV resulted in a concentration peak of ≃ 14 at.% at a depth of ≃ 700 A. Energy spectra of backscattered 2 MeV He+ ions were used to determine the Au concentration versus depth during isothermal anneal sequences at 665 and 780 C. It was found that the implantation peak in the Au concentration profile did not broaden with annealing, but rather decreased continuously in amplitude. Gold diffused from the implanted layer into the bulk of the sample, where its concentration was ≲ 0.1 at.%. A quantitative description of this behavior was achieved by using the diffusion equation and by assuming the concentration outside the implanted layer to be limited by the solid solubility of Au in a-Be. Diffusion coefficients D and solid solubilities Co were extracted from the analysis with uncertainties of about ±30% in D and ±10% in Co: at 665 C, DA = 2.8 x 10-12 cm2/sec, DC = 1.5 x 10-12, and Co = 0.043 at.%; at 780 C, DA = 6.5 x 10-11, DC = 4.3 x 10-11, and Co = 0.10 at.%. The absolute magnitude, temperature dependence, and anisotropy of D (DC/dA ~ 0.6) were found to be similar to those reported for Cu in Be. This consistency contrasts with the findings of Naik, Dupouy, and Adda for Ag in Be, where the anisotropy was reversed (DC/DA ~ 1.8).


Solid Solubility Mosaic Spread Fluence Level Final Slope Thermal Kinetic 
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  1. 1.
    S. M. Myers, S. T. Picraux, and T. S. Prevender (submitted to Physical Review).Google Scholar
  2. 2.
    See, for example, A. R. Kaufmann and P. Corzine, The Metal Beryllium, edited by White and Burke (Am. Soc. Met., Cleveland, 1955), Chap. 10.Google Scholar
  3. 3.
    See, for example, M. Hansen, Constitution of Binary Alloys (McGraw-Hill, N. Y., 1958), 2nd ed., p. 282.Google Scholar
  4. 4.
    S. S. Sidhu and C.O. Henry, J. Appl. Phys. 21, 1036 (1950).CrossRefGoogle Scholar
  5. 5.
    G. P. Chatterjee, J. Mines, Metals, and Fuels (India), June 1962, p. 20.Google Scholar
  6. 6.
    J. M. Dupouy, J. Mathie, and Y. Adda, Mémoires Scientifiques Rev. Metallurg. 63, 481 (1966).Google Scholar
  7. 7.
    J. M. Dupouy, J. Mathie, and Y. Adda, Proc. Conf. Intern. sur la Metallurgie du Beryllium, Grenoble, 1965 (Presses Universitaires de France, Paris), p. 159.Google Scholar
  8. 8.
    M. C. Naik, J. M. Dupouy, and Y. Adda, Mémoires Scientifiques Rev. Metallurg. 63, 488 (1966).Google Scholar
  9. 9.
    A. D. LeClaire, Phil. Mag. 7, 141 (1962).CrossRefGoogle Scholar
  10. 9a.
    A detailed discussion of the application of this theory to diffusion in the hcp lattice has been given by P. B. Ghate, Phys. Rev. 133, A1167 (1964).CrossRefGoogle Scholar
  11. 10.
    See, for example, S. T. Picraux and F. L. Vook, Appl. Phys. Lett. l8, 191 (1971);CrossRefGoogle Scholar
  12. 10a.
    J. F. Ziegler and J.E.E. Baglin, J. Appl. Phys. 42, 2031 (1971).CrossRefGoogle Scholar
  13. 11.
    W. K. Chu and D. Powers, Phys. Rev. 187, 478 (1969).CrossRefGoogle Scholar
  14. 12.
    J. A. Borders, Rad. Effects l6, 253 (1972).Google Scholar
  15. 13.
    P. D. Bourland, W. K. Chu, and D. Powers, Phys. Rev. B3, 3625 (1971).Google Scholar
  16. 14.
    See, for example, P. D. Bourland and D. Powers, Phys. Rev. B3, 3635 (1971);Google Scholar
  17. 14a.
    D. Powers, A. S. Lodhe, W. K. Lin, and H. L. Cox, Proc. Intl. Conf. on Ion Beam Surface Layer Analysis, Yorktown Heights, N. Y., 1973 (in press).Google Scholar
  18. 15.
    See, for example, R. E. Honig, RCA Review 23, 567 (1962).Google Scholar
  19. 16.
    See, for example, R. V. Churchill, Operational Mathematics (McGraw-Hill, N. Y., 1958), Chap. 4.Google Scholar

Copyright information

© Plenum Press, New York 1974

Authors and Affiliations

  • S. M. Myers
    • 1
  • R. A. Langley
    • 1
  1. 1.Sandia LaboratoriesAlbuquerqueUSA

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