Refractive Index Profiles Produced in Silica Glass by Ion Implantations
Refractive index profiles produced by 300 kV Ne, Ar and Kr and 20 kV He irradiation in silica glass are presented. These are obtained by a technique involving a series of ellipsometric measurements taken at small depth intervals through the implanted region, and computer analysis transforms the data thus obtained into a complex-refractive-index profile. The major effect can be attributed to the compaction of the silica lattice, but the nature of a shallow peak at the surface is unknown. Annealing data qualitatively confirm the role of radiation damage. Backscattering studies are used to determine the implant distribution and show that Bi may be a suitable species for producing genuine implantation refractive index changes since no significant migration of the Bi occurs at temperatures sufficiently high to anneal the radiation damage.
KeywordsRadiation Damage Silica Glass Refractive Index Change Refractive Index Profile Ellipsometric Measurement
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