Advertisement

Physical Profile Measurements in Insulating Layers Using the Ion Analyser

  • J. L. Combasson
  • J. Bernard
  • G. Guernet
  • N. Hilleret
  • M. Bruel
Part of the The IBM Research Symposia Series book series (IRSS)

Abstract

Ion analysing as a continuous profiling method is very versatile and powerful, provided some attention is given to operating conditions. In this paper, the experimental procedure will be described and typical results of implanted boron ion distributions in insulating layers presented. Attention will be focused on the shape of the profile compared with some theoretical calculations, showing the interest of this profiling technique in verifying theoretical hypothesis and for the adjustment of parameters. A correlation will also be made with results obtained using nuclear reactions.

Keywords

Silicon Nitride Nuclear Reaction Edgeworth Expansion Range Profile Nuclear Reaction Analysis 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

Preview

Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.

References

  1. [1]
    K. B. Winterbon, Rad. Effects 13, 215 (1972).CrossRefGoogle Scholar
  2. [2]
    K. B. Winterbon, Rad. Effects 15, 73 (1972).CrossRefGoogle Scholar
  3. [3]
    J. Bottiger and J. A. Davies, Rad. Effects 11, 61 (1971)CrossRefGoogle Scholar
  4. [4]
    J. Bottiger, J. A. Davies, P. Sigmund and K. B. Winterbon, Rad. Effects 11, 69 (1971)CrossRefGoogle Scholar
  5. [5]
    J. Bottiger, H. W. Jorgensen and K. B. Winterbon, Rad. Effects 11, 133 (1971).CrossRefGoogle Scholar
  6. [6]
    M. Bruel, M. Boissier, E. Ligeon. Analyse de traces par utilisation simultanee d’un abraseur ionique et des techniques de reactions nuclearies. Communications at Reunions Internationales sur l’Analyse par Activation, A.E.C. Saclay (2–6 October 1972).Google Scholar
  7. [7]
    C. M. Reinsch, Numer. Math. 10, 177 (1967).MathSciNetMATHCrossRefGoogle Scholar

Copyright information

© Plenum Press, New York 1973

Authors and Affiliations

  • J. L. Combasson
    • 1
  • J. Bernard
    • 1
  • G. Guernet
    • 1
  • N. Hilleret
    • 2
  • M. Bruel
    • 3
  1. 1.CEA-CENG/LETIFrance
  2. 2.CEA-CENG/SCAG-EALCFrance
  3. 3.CEA-CENG/DRFFrance

Personalised recommendations