Theoretical and Experimental Studies on Lateral Spread of Implanted Ions

  • Seijiro Furukawa
  • Hideki Matsumura
Part of the The IBM Research Symposia Series book series (IRSS)


Theoretical considerations concerned with lateral spread of implanted ions are briefly discussed by use of 2nd order differential equations derived from the theory of Lindhard et al. And, the lateral spread is observed experimentally by a backscattering technique. The experimental results are in good agreement with the theoretical considerations. It is concluded that the lateral spread of implanted ions can not be neglected.


Incident Energy Depth Distribution Lateral Spread Solid State Detector Rest Point 
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Copyright information

© Plenum Press, New York 1973

Authors and Affiliations

  • Seijiro Furukawa
    • 1
  • Hideki Matsumura
    • 1
  1. 1.Department of Physical Electronics Faculty of EngineeringTokyo Institute of TechnologyTokyoJapan

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