Theoretical and Experimental Studies on Lateral Spread of Implanted Ions
Theoretical considerations concerned with lateral spread of implanted ions are briefly discussed by use of 2nd order differential equations derived from the theory of Lindhard et al. And, the lateral spread is observed experimentally by a backscattering technique. The experimental results are in good agreement with the theoretical considerations. It is concluded that the lateral spread of implanted ions can not be neglected.
KeywordsIncident Energy Depth Distribution Lateral Spread Solid State Detector Rest Point
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