Off-Line Quality Control in Integrated Circuit Fabrication using Experimental Design
This paper describes and illustrates the off-line quality control method, which is a systematic method of optimizing a production process. It also documents our efforts to optimize the process for forming contact windows in 3.5-μm technology complementary metal-oxide semiconductor (CMOS) circuits fabricated in the Murray Hill Integrated Circuit Design Capability Laboratory (MH ICDCL). Here, by optimization we mean minimizing the process variance while keeping the process mean on target.
KeywordsPhosphorus Tate Polysilicon
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- 1.Taguchi, G. 1978. Off-line and On-line Quality Control Systems. International Conference on Quality Control, B4-1-5. Tokyo, Japan.Google Scholar
- 2.Kackar, R. N., and M. S. Phadke. n.d. An Introduction to Off-line and On-line Quality Control Methods. Unpublished work.Google Scholar
- 3.Taguchi, G., and Y. Wu. 1980. Introduction to Off-Line Quality Control. Nagoya, Japan: Central Japan Quality Control Association.Google Scholar
- 4.Glaser, A. B., and G. A. Subak-Sharp. 1977. Integrated Circuits Engineering. Reading, Mass.: Addison-Wesley.Google Scholar
- 6.Hicks, C R. 1973. Fundamental Concepts in the Design of Experiments. New-York: Holt, Rinehart and Winston.Google Scholar
- 7.Searle, S. R. 1971. Linear Models. New York: John Wiley and Sons.Google Scholar
- 8.Taguchi, G. 1975. A New Statistical Analysis Method for Clinical Data, the Accumulation Analysis, in Contrast with the Chi-square Test. Shinjuku Shobo, Tokyo, Japan.Google Scholar
- 9.Myers, R. N. 1971. Response Surface Methodology. Newton, Mass.: Allyn and Bacon.Google Scholar
- 10.Box, G. E. P., and N. R. Draper. 1969. Evolutionary Operations: A Statistical Method for Process Improvement. New York: John Wiley and Sons.Google Scholar
- 11.Snedecor, G. W., and W. G. Cochran. 1980. Statistical Methods. Ames, Iowa: Iowa State University Press.Google Scholar