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Microstructural Analysis pp 315–329Cite as

Ion Scattering Spectroscopy for Microstructural Analysis

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Abstract

The knowledge of surface composition and its relation to other materials properties is becoming more important as new techniques make this information available. One of the most recent developments for this type of surface analysis is the ion scattering spectrometer (ISS). This instrument is unique in several aspects, foremost of which is its ability to determine the elemental constituents in the outermost atomic surface layer. In ion scattering spectrometry, a surface is bombarded with a beam of noble gas ions and then the energies of the scattered ions are analyzed. A certain fraction of these ions experience binary elastic collisions with the surface atoms, and the ions energies after such collisions, enabling the surface atoms to be identified. Hence, by recording the energy spectra of the scattered binary ions, surface atoms in the first atomic layer are detected and identified. With ISS, it is possible to determine not only the composition of the outermost atomic layer, but also the composition of successive deeper layers into the specimen. Thus, the composition as a function of depth, a depth profile, can be established. The realization of this technique was made possible by advancements in ultrahigh vacuum and ion optics technology over the last decade.

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Author information

Authors and Affiliations

  1. Battelle - Columbus Laboratories, Columbus, Ohio, 43201, USA

    Robert S. Carbonara

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  1. Robert S. Carbonara
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Editor information

Editors and Affiliations

  1. Battelle Columbus Laboratories, Columbus, Ohio, USA

    James L. McCall

  2. American Society for Metals, Metals Park, Ohio, USA

    William M. Mueller (Director of Education) (Director of Education)

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© 1973 Plenum Press, New York

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Carbonara, R.S. (1973). Ion Scattering Spectroscopy for Microstructural Analysis. In: McCall, J.L., Mueller, W.M. (eds) Microstructural Analysis. Springer, Boston, MA. https://doi.org/10.1007/978-1-4615-8693-7_13

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  • DOI: https://doi.org/10.1007/978-1-4615-8693-7_13

  • Publisher Name: Springer, Boston, MA

  • Print ISBN: 978-1-4615-8695-1

  • Online ISBN: 978-1-4615-8693-7

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