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Phase Relationships in Semiconductors

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Atomic Diffusion in Semiconductors

Abstract

The distribution of solutes in semiconductors has a significant effect on device performance and has therefore been extensively studied. A considerable part of this work has been concerned with the distribution of solutes between phases both during crystal growth and in the course of subsequent processing. As a result of this, the theory of equilibrium processes is now relatively well understood but because of difficulties with the analysis of the very dilute solutions involved, the amount of reliable experimental data is still rather limited.t Studies of non-equilibrium processes have been hindered by the problems of measuring all the parameters involved but a considerable body of semiempirical data has been amassed.

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  1. J. C. Brice
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  1. Department of Physics, The University Hull, England

    D. Shaw

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© 1973 Plenum Publishing Company Ltd

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Brice, J.C. (1973). Phase Relationships in Semiconductors. In: Shaw, D. (eds) Atomic Diffusion in Semiconductors. Springer, Boston, MA. https://doi.org/10.1007/978-1-4615-8636-4_3

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  • DOI: https://doi.org/10.1007/978-1-4615-8636-4_3

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