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Analysis with Heavy Ions

  • William A. Lanford

Abstract

In the past decade, nondestructive analysis using heavy-ion beams has become increasingly important both in fundamental physics and in technology. For example, see (An 80) and (Du 79). Perhaps the most obvious example is the important contribution Rutherford backscattering spectrometry has made in the development of the planar thin-film technology that has made possible the present revolution in microelectronics. Indeed, many of the major corporations in this industry now have their own accelerators used exclusively for analysis. While it is still too early to judge the full impact in other fields, there are strong indications that analysis using heavy ions will make equally important contributions to such diverse areas as fundamental surface science, energy, corrosion, and material science.

Keywords

Solar Wind Hydrogen Content Ultracold Neutron Hydrogen Impurity Nuclear Reaction Analysis 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer Science+Business Media New York 1985

Authors and Affiliations

  • William A. Lanford
    • 1
  1. 1.Department of PhysicsState University of New York/AlbanyAlbanyUSA

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