Abstract
Properties of thin films are determined by their chemical composition, the content and type of impurities in the bulk and on the surface, crystal structure of the bulk and surface, and the types and density of structural defects. Thus, all these parameters should be known and, if possible, modified during deposition.
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© 1977 Ludmila Eckertová
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Eckertová, L. (1977). Composition, Morphology and Structure of Thin Films. In: Physics of Thin Films. Springer, Boston, MA. https://doi.org/10.1007/978-1-4615-7589-4_5
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DOI: https://doi.org/10.1007/978-1-4615-7589-4_5
Publisher Name: Springer, Boston, MA
Print ISBN: 978-1-4615-7591-7
Online ISBN: 978-1-4615-7589-4
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