Abstract
It has been found by observation of films evaporated directly in the viewing field of an electron microscope that film growth may be divided into certain stages. These are as follows:
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(1)
Nucleation, during which small nuclei are formed that are statistically distributed (with some exceptions) over the substrate surface.
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(2)
Growth of the nuclei and formation of larger islands, which often have the shape of small crystals (crystallites).
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(3)
Coalescence of the islands (crystallites) and formation of a more or less connected network containing empty channels.
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(4)
Filling of the channels.
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© 1977 Ludmila Eckertová
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Eckertová, L. (1977). Mechanism of Film Formation. In: Physics of Thin Films. Springer, Boston, MA. https://doi.org/10.1007/978-1-4615-7589-4_4
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DOI: https://doi.org/10.1007/978-1-4615-7589-4_4
Publisher Name: Springer, Boston, MA
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Online ISBN: 978-1-4615-7589-4
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