Abstract
Scanning acoustic microscopy (SAM) has been established since 1974(1) and has found a wide range of applications as well as numerous variations of the original method (see Ref. 2 for a general introduction and overview). It is still the exclusive alternative to optical microscopy in the field of classical wave microscopy, implying that waves in the “classical sense” are employed for observation. Unlike optical microscopy, the contrast in acoustical images is directly related to the mechanical properties of the sample and the coupling fluid, which has to be present in SAM to allow the propagation of acoustic waves between the focusing transducer device (“acoustic lens”) and the sample.
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References
Lemons, R. A., Quate, C. F. (1974). Acoustic microscope—scanning version. Appl. Phys. Lett. 24, 163–165.
Briggs, A. (1992). Acoustic Microscopy. Clarendon Press, Oxford.
Litniewski, I, and Bereiter-Hahn, J. (1990). Measurements of cells in culture by scanning acoustic microscopy. J. Microsc. (Oxford) 158, 95–107.
Hildebrand, J. A., Liang, K., and Bennett, S. D. (1983). Fourier transform approach to numerical characterization with the acoustic microscope. J. Appl. Phys. 54, 7016–7019.
Reinholdtsen, P. A., and Khuri-Yakub, B. T. (1991). Image processing for a scanning acoustic microscope that measures amplitude and phase. IEEE Trans. Ultrason. Ferroelectr. and Freq. Contr. 38(2), 141–147; and references therein.
Sasaki, Y., Endo, T., Yamagishi, T., and Sakai, M. (1992). Thickness measurement of a thinfilm layer on an anisotropic substrate by phase-sensitive acoustic microscope. IEEE Trans. Ultrason. Ferroelectr. Freq. Contr. 39(5), 638–642.
Liang, K. K., Bennett, S. D., and Kino, G. S. (1986). Precision phase measurement with short tone burst signals in acoustic microscopy. Rev. Sci. Instrum. 57, 446–452.
Markwitz, A., Baumann, H., Grill, W., Knop, A., Krimmel, E. F., and Bethge, K. (1994). Investigations of ultrathin silicon nitride layers produced by low-energy ion implantation and EB-RTA. Nucl. Instrum. Methods in Phys. Res. B 89, 362–368.
Liang, K. K., Kino, G. S., and Khuri-Yakub, B. T. (1985). Material characterization by the inversion of V(z). IEEE Trans. Sonics Ultrason. SU-32, 213–224.
Hillmann, K., Grill, W., and Bereiter-Hahn, J. (1994). Determination of ultrasonic attenuation in small samples of solid material by scanning acoustic microscopy with phase contrast. J. Alloys Compounds 211/212, 625–627.
Würz, K. U., Wesner, J., Hillmann, K., and Grill, W. (1995). Determination of elastic constants using a scanning acoustic microscope. Z. Phys. B 97, 487–492.
von Gutfeld, R. J., and Nethercot, A. H. (1964). Heat pulses in quartz and sapphire at low temperatures. Phys. Rev. Lett. 12, 641–643.
Taylor, B., Maris, H. J., and Elbaum, C. (1969). Phonon focusing in solids. Phys. Rev. Lett. 23, 416–419.
Taylor, B., Maris, H. J., and Elbaum, C. (1971). Focusing of phonons in crystalline solids due to elastic anisotropy. Phys. Rev. B 3, 1462–1472.
Northrop, G. A., and Wolfe, J. P. (1980). Ballistic phonon imaging in germanium. Phys. Rev. B 22, 6196–6212.
Hensel, J. C., and Dynes, R. C. (1979). Observation of singular behavior in the focusing of ballistic phonons in Ge. Phys. Rev. Lett. 43, 1033–1036.
Ulbrich, R. G. (1985). In: Proceedings of a NATO Advanced Study Institute of Nonequilibrium Phonon Dynamics (W.E. Bron, ed.), Plenum Press, New York, pp. 101–127.
Huebener, R. P. (1993). In: Phonon Scattering in Condensed Matter VII (M. Meissner and R. O. Pohl, eds.), Springer-Verlag, Berlin, pp. 63–67.
Eichele, R., Hübener, R. P., and Seifert, H. (1982). Phonon focusing in quartz and sapphire imaged by electron beam scanning. Z. Phys. B 48, 89–97.
Every, A. G. (1993). Thermal phonon imaging. In: Die Kunst of Phonons, (T. Paszkiewicz and K. Rapcewicz, eds.), Plenum Press, New York, pp. 55–71.
Rösch, F., and Weis, O. (1976). Geometric propagation of acoustic phonons in monocrystals within anisotropic continuum acoustics. Z. Phys. B 25, 101–122.
Maris, H. J. (1983). Effect of finite phonon wavelength on phonon focusing. Phys. Rev. B 28, 7033–7037.
Hauser, M. R., Weaver, R. L., and Wolfe, J. P. (1992). Internal diffraction of ultrasound in crystals: Phonon focusing at long wavelengths. Phys. Rev. Lett. 68, 2604–2607.
Weaver, R. L., Hauser, M. R., and Wolfe, J. P. (1993). Acoustic flux imaging in anisotropic media. Z. Phys. B 90, 27–46.
Wesner, J., Würz, K. U., Hillmann, K., and Grill, W. (1993) In: Phonon Scattering in Condensed Matter VII (M. Meissner and R. O. Pohl, eds.), Springer-Verlag, Berlin, pp. 68–70.
Truell, R., Elbaum, C., and Chick, B. B. (1969). Ultrasonic Methods in Solid State Physics, Academic Press, New York.
Gorodetsky, G., and Lachterman, I. (1981). Pulse-echo ultrasonic interferometer for the automatic measurements of velocity and attenuation changes. Rev. Sci. Instrum. 52, 1386–1387.
Rokhlin, S. I., and Wang, W. (1992). Double through-transmission bulk wave method for ultrasonic phase velocity measurement and determination of elastic constants of composite materais. J. Acoust. Soc. Am. 91, 3303–3312.
Chu, Y. C., and Rokhlin, S. I. (1994). Comparative analysis of through-transmission ultrasonic bulk wave methods for phase velocity measurements in anisotropic materials. J. Acoust. Soc. Am. 95, 3204–3212.
Gornall, W. S., and Stoicheff, B. P. (1971). Determination of the elastic constants of xenon single crystals by Brillouin scattering. Phys. Rev. B 4, 4518–4535.
Mendik, M., Sathish, S., Kulik, A., Gremaud, G., and Wachter, P. (1992). Surface acoustic wave studies on single-crystal nickel using Brillouin scattering and scanning acoustic microscope. J. Appl. Phys. 71, 2830–2834.
Goto, T., and Anderson, O. L. (1988). Apparatus for measuring elastic constants of single crystals by a resonance technique up to 1825 K. Rev. Sci. Instrum. 59, 1405.
Demarest, H. H., Jr. (1971). Cube-resonance method to determine the elastic constants of solids. J. Acoust. Soc. Am. 49, 768–775.
Every, A. G., Sachse, W., Kim, K. Y., and Thompson, M. O. (1990). Phonon focusing and mode-conversion effects in silicon at ultrasonic frequencies. Phys. Rev. Lett. 65, 1446–1449.
Every, A. G., Kim, K. Y., and Sachse, W. (1993). Phonon imaging at ultrasonic frequencies: The dynamic response of anisotropic solids. In: Die Kunst of Phonons (T. Paszkiewicz and K. Rapcewicz, eds.), Plenum Press, New York, pp. 73–85.
Every, A. G., and Sachse, W. (1990). Determination of the elastic constants of anisotropic solids from acoustic-wave group-velocity measurements. Phys. Rev. B 42, 8196–8205.
Every, A. G., and Sachse, W. (1991). Imaging of laser-generated ultrasonic waves in silicon. Phys. Rev. B 44, 6689–6699.
Chai, J. F., and Wu, T. T. (1994). Determinations of anisotropic elastic constants using laser-generated surface waves. J. Acoust. Soc. Am. 95, 3232–3241.
Kim, K. Y., and Sachse, W. (1993). Determination of all elastic constants of transversely isotropic media with a cusp around the symmetric axis by use of elastic pulses propagating in two principal directions. Phys. Rev. B 47, 10993–11000.
Every, A. G., and McCurdy, A. K. (1987). Phonon focusing in piezoelectric crystals. Phys. Rev. B 36, 1432–1447.
Šutilov, V. A. (1984). Physik des Ultraschalls, Akademie-Verlag, Berlin.
Auld, B. A. (1990). Acoustic Fields and Waves in Solids, Robert E. Krieger, Huntington, NY.
Northrop, G. A. (1982). Acoustic phonon anisotropy: Phonon focusing. Computer Phys. Commun. 28, 103–106.
Rokhlin, S. I., Bolland, T. K., and Adler, L. (1986). Reflection and refraction of elastic waves on a plane interface between two generally anisotropic media. J. Acoust. Soc. Am. 79, 906–918.
Press, W.H., Teukolsky, S. A., Vetterling, W. T., and Flannery, B. P. (1992). Numerical Recipes in C, 2nd ed., Cambridge University Press, London.
Würz, K. U. (1995). Ultraschallmikroskopische Untersuchungen der akustischen Anisotropie von Einkristallen. Dissertation, Frankfurt am Main.
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Grill, W., Hillmann, K., Würz, K.U., Wesner, J. (1996). Scanning Ultrasonic Microscopy with Phase Contrast. In: Briggs, A., Arnold, W. (eds) Advances in Acoustic Microscopy. Advances in Acoustic Microscopy, vol 2. Springer, Boston, MA. https://doi.org/10.1007/978-1-4615-5851-4_4
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DOI: https://doi.org/10.1007/978-1-4615-5851-4_4
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