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Heat Conduction in Crystalline Silicon Films

  • Y. Sungtaek Ju
  • Kenneth E. Goodson
Part of the Microsystems book series (MICT, volume 6)

Abstract

The nature of heat transport in crystalline non-metallic solids is very different from that in their amorphous counterparts. This yields drastic differences in the magnitude and temperature dependence of the thermal conductivities of the two types of materials. The short mean free paths of heat carriers in amorphous materials permit the use of the heat diffusion equation to describe thermal phenomena at typical operating temperatures of microdevices. The validity of this approximation in crystalline silicon regions of compact semiconductor devices is the central question of this chapter.

Keywords

Phonon Spectrum Phonon Dispersion Silicon Film Phonon Branch Heat Diffusion Equation 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer Science+Business Media New York 1999

Authors and Affiliations

  • Y. Sungtaek Ju
    • 1
  • Kenneth E. Goodson
    • 1
  1. 1.Stanford UniversityUSA

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