Cantilevers with Interdigital Deflection Sensors

  • S. C. Minne
  • S. R. Manalis
  • C. F. Quate
Part of the Microsystems book series (MICT, volume 3)


We will present in this chapter an optical method for measuring the cantilever deflection that is suitable for arrays. It consists of a integrated, deformable, diffraction grating etched into the cantilever beam. In the new sensor several sets of rectangular fingers mesh together to form a deformable diffraction grating. This type of interference sensor is commonly known as the ‘interdigital’ cantilever. The intensity of the light diffracted into the higher orders by this grating gives us a measure of the deflection of the set of fingers attached to the beam that carries the tip. This is in contrast to the optical lever where the position of the optical beam is used to measure the deflection.


Shot Noise Optical Simulation Johnson Noise Cantilever Deflection Diffract Mode 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.


Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.


  1. 1.
    O. Solgaard, F.S.A Sandejas, and D.M. Bloom, “Deformable grating optical modulator,” Optics Letters, vol. 17, no.9, 688 (1992)CrossRefGoogle Scholar
  2. 2.
    A. Atalar, S.R. Manalis, S.C. Minne, C.F. Quate, “Interdigital Deflection Sensor for Microcantilevers,” Patent pending.Google Scholar
  3. 3.
    G. Fowles, Introduction to Modern Optics, Holt, Rinehart and Winston, New York, (1967)Google Scholar
  4. 4.
    H. Weaver, Application of Discrete and Continuous Fourier Analysis, John Wiley and Sons, New York, (1983)Google Scholar
  5. 5.
    J.W. Goodman, Introduction of Fourier Optics, 2nd Edition, McGraw Hill (1996)Google Scholar
  6. 6.
    S.M. Sze, Physics of Semicondoctor Devices, 2nd Edition, John Wiley and Sons, New York (1981).Google Scholar
  7. 7.
    D. Sarid, Scanning Force Microscopy, Oxford University Press, New York (1991).Google Scholar

Copyright information

© Springer Science+Business Media New York 1999

Authors and Affiliations

  • S. C. Minne
    • 1
  • S. R. Manalis
    • 2
  • C. F. Quate
    • 3
  1. 1.Nanodevices, Inc.USA
  2. 2.Massachusetts Institute of TechnologyUSA
  3. 3.Stanford UniversityUSA

Personalised recommendations