Heater-cantilevers for writing: design, fabrication and basic characterization

  • Benjamin W. Chui
Part of the Microsystems book series (MICT, volume 1)


This chapter describes a micromachined cantilever with an integrated heating element in the form of a lightly doped, high-resistivity region near the tip of the cantilever. The rest of the cantilever is heavily doped and has low electrical resistance (Fig. 2.1). When electric current flows through the cantilever, power is dissipated mainly within the high-resistivity heater region, leading to a localized temperature rise at the tip. Thermal writing can be accomplished when the tip is brought into contact with a polycarbonate substrate.


Silicon Layer Heater Region Basic Characterization Electric Current Flow Intrinsic Carrier Concentration 
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Copyright information

© Springer Science+Business Media New York 1999

Authors and Affiliations

  • Benjamin W. Chui
    • 1
  1. 1.Stanford UniversityUSA

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