Energy Dispersive Spectroscopy

  • Phuc D. Ngo
Part of the The Springer International Series in Engineering and Computer Science book series (SECS, volume 494)


Energy Dispersive Spectroscopy (EDS, also sometimes called EDX or Energy Dispersive X-ray Analysis) is the most frequently used chemical analysis tool in failure analysis. It has some very significant advantages. It is used as an attachment to the SEM (Scanning Electron Microscope), which is readily available in every failure analysis laboratory. Analysis is performed in minutes. The spectra are easily interpreted. Spatial resolution is good. It also has some limitations as an analysis tool. Sensitivity is limited to concentrations on the order of 0.1% in the sampled volume. A second limitation is the sampled volume is relative large compared to the thickness of semiconductor thin films and deep submicron particles. A final limitation is that it provides strictly atomic information as opposed to molecular. These limitations are addressed by the three other key chemical analysis techniques, which will be discussed in the next three chapters.


Energy Dispersive Spectroscopy Failure Analysis Interaction Volume Semiconductor Thin Film Stainless Steel Particle 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.


Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.


  1. 1.
    Krane, Kenneth. Modern Physics, pages 74 and 214.. John Wiley and Sons, 1983.Google Scholar
  2. 2.
    Goldstein Joseph I, Newbury Dale E, Echlin Patrick, Joy David C, Fiori Charles, Lifshin, Eric. Scanning Electron Microscopy and X-ray Microanalysis. New York: Plenum Press, 1981.CrossRefGoogle Scholar
  3. 3.
    Kittel, Charles. Introduction to Solid State Physics, page 303. John Wiley and Sons, 1986.Google Scholar
  4. 4.
    Silver E, LeGros M, Madden N, Beeman J, Haller E. High-Resolution, Broad-Band Microcalori meters for X-ray Microanalysis. X-ray Spectrometry, 1996, 25, 115.CrossRefGoogle Scholar
  5. 5.
    Wollman DA, Irwin KD, Hilton GC, Dulcie LL, Newbury DE, Martinis JM. High-Resolution, Energy-Dispersive Microcalorimeter Spectrometer for X-ray Microanalysis. Journal of Microscopy, 1997, 188, 196.CrossRefGoogle Scholar

Copyright information

© Springer Science+Business Media New York 1999

Authors and Affiliations

  • Phuc D. Ngo
    • 1
  1. 1.ST MicroelectronicsUSA

Personalised recommendations