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Strain and critical thickness

  • S. Jain
  • M. Willander
  • R. Van Overstraeten
Chapter
Part of the Electronic Materials Series book series (EMAT, volume 7)

Abstract

Consider an epilayer of a semiconductor with lattice constant al} grown on a thick substrate with lattice constant asub} (illustrated in Fig. 3.1). The lattice mismatch is measured by the misfit parameter fm} defined below [3, 235]

Keywords

Burger Vector Critical Thickness Misfit Dislocation Dislocation Line Strain Relaxation 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer Science+Business Media New York 2000

Authors and Affiliations

  • S. Jain
    • 1
  • M. Willander
    • 2
  • R. Van Overstraeten
    • 1
  1. 1.IMEC vzwLeuvenBelgium
  2. 2.Gothenburg UniversityGothenburgSweden

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