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Field Ion Microscopy

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Atom Probe Tomography

Abstract

Field ion microscopy is an important step that is almost always used at the start of an atom probe experiment to produce an atomically clean specimen with a well developed end form. It is also used to examine and characterize the microstructural features present in the specimen, and to select the initial area on the surface of the specimen for analysis in the atom probe. It is often used during and at the end of an atom probe experiment to check the progress of the experiment and to determine certain experimental parameters. The overall shape of the field ion image can often yield a reasonable estimate of the shape and aspect ratio of the apex of the needle. The applications of field ion microscopy have been reviewed recently [1].

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Miller, M.K. (2000). Field Ion Microscopy. In: Atom Probe Tomography. Springer, Boston, MA. https://doi.org/10.1007/978-1-4615-4281-0_3

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  • DOI: https://doi.org/10.1007/978-1-4615-4281-0_3

  • Publisher Name: Springer, Boston, MA

  • Print ISBN: 978-1-4613-6921-9

  • Online ISBN: 978-1-4615-4281-0

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