Advertisement

Effects Due to Negative Ions and Particles in Plasmas

  • Alan Garscadden
Part of the NATO ASI Series book series (NSSB, volume 220)

Abstract

This paper considers some of the varied effects that may occur in electronegative plasmas, plasmas containing particles, and the effects of the negative ions and particles on the plasma properties and plasma chemistry. Important work relating to the topics has been given recently by Mandich and Reents (1989) on the reactions of silicon clusters with SiD4; by Emeleus and Breslin (1970) on the influence of dust in discharge positive columns, and by Gibson (1966) on ionization phenomena in gas-particle plasmas. The chemistry and atom-atom recombination promoted by the presence of particles has been considered by Gould and Salpeter (1963) and by Herbst and Klemperer (1973) with relevance to the formation and depletion of molecules in interstellar space. Ferreira et al (1988) have analyzed quasi-neutral columns in electronegative gases.

Keywords

Electron Energy Distribution Function Positive Column Attachment Rate Silicon Cluster Dissociative Electron Attachment 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

Preview

Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.

References

  1. Bely, O., and Schwartz, S.B., 1969, J. Phys., B2, 159.ADSGoogle Scholar
  2. Drevillon, B., Huc, J., Lloret, A., Perrin, J., deRosny G., and Schmitt, J.P.M., 1981, “Positive and Negative Ions in Silane Plasmas”, 634–637, Proceedings of the 5th International Symposium on Plasma Chemistry, eds Waldie, B., and Farnell, G.A.Google Scholar
  3. Emeleus, K.G., and Breslin A.C., 1970, Int. J. Electronics, 29,1.CrossRefGoogle Scholar
  4. Emeleus, K.G., Gray, E.W., Coulter, J.R.M., and Woolsey, G.A 1968, Int. J. Electronics, 25 367.CrossRefGoogle Scholar
  5. Ferreira, C.M., Gousset, G., and Touzeau, M., 1988, J. Phys. D., Appl. Phys., 21, 1403.ADSCrossRefGoogle Scholar
  6. Fledderman, C.B., Beberman, J.H., and J.T. Verdeyen, 1985, J. Appl. Phys.,58, 1344.ADSCrossRefGoogle Scholar
  7. Gibson, E.G., 1966, PhD Thesis, California Institute of Technology.Google Scholar
  8. Gould, R.J., and Salpeter, E.E., 1963, Astrophys. J., 138, 393ADSCrossRefGoogle Scholar
  9. Haas, R., 1973, Phys. Rev., A8, 1017.ADSCrossRefGoogle Scholar
  10. Hayashi, M., 1987, in “Swarm Studies and Inelastic Electron-Molecule Collisions” eds L.C. Pitchford, B.V. McKoy, A. Chutjian and S. Trajmar, Springer Verlag, New York.Google Scholar
  11. Herbst, E., and Klemperer, W., 1973 Astrophys. J., 185, 505.ADSCrossRefGoogle Scholar
  12. Lawton, J., and Weinberg, F.J., 1969, “Electrical Aspects of Combustion”, Clarendon Press, Oxford.Google Scholar
  13. Mandich, M.L., and Reents, W.D., 1989, J. Chem Phys., 90, 3121.ADSCrossRefGoogle Scholar
  14. Peart, B., and Dolder, K.T., 1973, J. Phys.,B6, 1497.ADSGoogle Scholar
  15. Perrin, J., Lloret, A., de Rosny, G., and Schmitt, J.P.M., 1984, Intl J. of Mass Spec. and Ion Physics, 57, 249.ADSCrossRefGoogle Scholar
  16. Reist, P.C., 1984, “Introduction to Aerosol Science”, Macmillan, New York.Google Scholar
  17. Roth, R.M., Spears, K.G., Stein, G.D., and Wong, G., 1986, Appl. Phys. Lett., 46, 253ADSCrossRefGoogle Scholar
  18. Selwyn, G.S., Singh, J., and Bennett, R.S., 1989, J. Vac. Sci. Tech., to be published.Google Scholar
  19. Srivastava, S.K., and de A Souza, A.C., to be published.Google Scholar

Copyright information

© Springer Science+Business Media New York 1990

Authors and Affiliations

  • Alan Garscadden
    • 1
  1. 1.Wright Research and Development CenterWright-Patterson AFBUSA

Personalised recommendations