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Electron - Molecule Collision Cross Sections for Etching Gases

  • Kurt H. Becker
Part of the NATO ASI Series book series (NSSB, volume 220)

Abstract

The purpose of this article is twofold. Firstly, we will review the current status of electron - molecule collision cross sections for those etching gases that are most commonly used as the reactive constituents of processing plasmas. This includes a discussion of (1) what are the molecules for which cross section data are needed most urgently and (2) what are the particular cross sections that are needed for the various target molecules. Secondly, we will discuss some specific aspects of dissociative electron collisions with the reactive constituents of processing plasmas, since the dissociation of the feedstock molecules in a discharge mixture induced by electron impact plays a key role in any effort to understand and to model the complex processes in the plasma.

Keywords

Processing Plasma Emission Cross Section Dissociative Recombination Dissociative Excitation Appearance Potential 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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References

  1. 1.
    J.B. Gerado and J.T. Verdeyen, “Low-Temperature Plasma Physics: Its Importance and Potential in Technology and Commerce”, Sandia National Laboratory Report No. SAND87–1875 (1987)Google Scholar
  2. 2.
    G. Ecker and K.U. Rieman, “The Technological Potential of Plasma Physics”, Experimentelle Technik der Physik 35, 119 (1987)Google Scholar
  3. 3.
    H.F. Winters, R.P.H. Chang, C.J. Mogab, J. Evans, J.A. Thornton and H. Yasuda, “Coatings and Surface Modifications Using Low-Temperature Non-Equilibrium Plasmas”, Materials Science and Engineering 70, 53 (1985)CrossRefGoogle Scholar
  4. 4.
    G.S. Oehrlein, “Advances in Dry Etching Processes Depend on Understanding Plasma-Surface Interactions”, Physics Today 39 (10), 26 (1986)CrossRefGoogle Scholar
  5. 5.
    J.P. Boeuf and E.E. Kunhardt, in “Swarm Studies and Inelastic Electron-Molecule Collisions”, eds: L.C. Pitchfors, V.B. McCoy, A. Chutijan and S. Trajmar (Springer Verlag: New York, 1987), p. 369CrossRefGoogle Scholar
  6. 6.
    L.E. Kline and M.J. Kushner, private communication (1987, 1988)Google Scholar
  7. 7.
    G.R. Scheller, R.A. Gottscho, T. Intrator and D.B. Graves, J. Appl. Phys. 64, 4384 (1988)ADSCrossRefGoogle Scholar
  8. 8.
    C.E. Gaebe and R.A. Gottscho, “Laser and Other Diagnostics of RF Discharges”, in “Radiative Processes in Discharge Lamps”, editors: J.M. Proud and L.H. Luessen (Plenum Press: New York, 1988)Google Scholar
  9. 9.
    R.A. Gottscho and M.L. Mandich, J. Vac. Sci. Techn. A3, 617 (1985)ADSCrossRefGoogle Scholar
  10. 10.
    R.A. Gottscho and T.A. Miller, Pure Appl. Chem. 56, 189 (1984)CrossRefGoogle Scholar
  11. 11.
    R.A. Bonham, private communication (1987, 1988)Google Scholar
  12. 12.
    M. Hayashi, in “Swarm Studies and Inelastic Electron-Molecule Collisions”, eds: L.C. Pitchford, V.B. Mc Coy, A. Chutijan and S. Trajmar (Springer Verlag: New York, 1987), p. 167CrossRefGoogle Scholar
  13. 13.
    R.N. Compton and J.N. Bardsley, “Dissociation of Molecules by Slow Electrons”, in “Electron-Molecule Collisions”, editors: I. Shimamura and K. Takanayama (Plenum Press: New York, 1984), p. 275CrossRefGoogle Scholar
  14. 14.
    K.A. Blanks, A.E. Tabor and K. Becker, J. Chem. Phys. 86, 4871 (1987)ADSCrossRefGoogle Scholar
  15. 15.
    K.A. Blanks and K. Becker, J. Phys. B 20, 6157 (1987)ADSCrossRefGoogle Scholar
  16. 16.
    Z.J. Jabbour, K. Blanks, K.E. Manus and K. Becker, J. Chem. Phys. 88, 4252 (1988)ADSCrossRefGoogle Scholar
  17. 17.
    Z.J. Jabbour, K.E. Martus and K. Becker, Z. Phys. D 9, 263 (1988)ADSCrossRefGoogle Scholar
  18. 18.
    Z.J. Jabbour and K. Becker, J. Chem. Phys. 90, 4819 (1989)ADSCrossRefGoogle Scholar
  19. 19.
    H.F. Winters and M. Inokuti, Phys. Rev. A 25, 1420 (1982)ADSCrossRefGoogle Scholar
  20. 20.
    R.C. Wetzel, F.A. Baiocchi, T.R. Hayes and R.S. Freund, Phys. Rev. A 35, 559 (1987)ADSCrossRefGoogle Scholar
  21. 21.
    G.R. Hebner, J.T. Verdeyen and M.J. Kushner, J. Appl. Phys. 63, 2226 (1988)ADSCrossRefGoogle Scholar
  22. 22.
    P.J. Hargis and K.E. Greenberg, Bull. Am. Phys. Soc. 34, 319 and 320 (1989)Google Scholar

Copyright information

© Springer Science+Business Media New York 1990

Authors and Affiliations

  • Kurt H. Becker
    • 1
  1. 1.Department of PhysicsCity College of The City University of New YorkNew YorkUSA

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