Theory of High — Frequency Discharges
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This work reviews the theory of gas discharges sustained by HF fields with emphasis on the electron kinetics as described by the Boltzmann equation.The analysis is however restricted to discharges controlled by processes occurring in the bulk, so that plasma-electrode interactions which play a major role in some RF discharges are not considered here.It is also assumed that ω ≫ τ e −1 where ω is the angular frequency of the applied field and τ e is the characteristic time for electron energy relaxation by collisions with the gas molecules.
KeywordsBoltzmann Equation Collision Frequency Maxwellian Distribution Break Curve Ambipolar Diffusion
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