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Theory of High — Frequency Discharges

Chapter
Part of the NATO ASI Series book series (NSSB, volume 220)

Abstract

This work reviews the theory of gas discharges sustained by HF fields with emphasis on the electron kinetics as described by the Boltzmann equation.The analysis is however restricted to discharges controlled by processes occurring in the bulk, so that plasma-electrode interactions which play a major role in some RF discharges are not considered here.It is also assumed that ω ≫ τ e −1 where ω is the angular frequency of the applied field and τ e is the characteristic time for electron energy relaxation by collisions with the gas molecules.

Keywords

Boltzmann Equation Collision Frequency Maxwellian Distribution Break Curve Ambipolar Diffusion 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer Science+Business Media New York 1990

Authors and Affiliations

  1. 1.Instituto Superior TécnicoCentro de Electrodinâmica da Universidade Técnica de Lisboa (INIC)LisboaPortugal

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