Abstract
The oxygen plasma induced surface modifications of a fluorinated and conventional polyimide were studied by X-ray Photoelectron Spectroscopy. The interaction between polyimides and oxygen plasma resulted in the formation of carbonyl (>C=O) and carboxylic acid (-COOH) sites in both types of polyimides. In the fluorinated polyimide, -CF3 containing polymeric residues were also detected. The plasma induced residues were loosely bound to the polyimide surface and could be removed by vacuum annealing of the plasma treated surfaces restoring the as-cured polyimide surface chemistry in both types of polyimides. The mechanism of interaction of oxygen plasma with both polyimides leading to the observed surface modifications is discussed.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
Preview
Unable to display preview. Download preview PDF.
References
B. P. Baranski and J. H. Nevin, J. Electronic Mater, 16, 39 (1987).
R. Flitsch and D. Y. Shih, J. Vac. Sci. Technol., A8., 2376 (1990).
M. J. Vasile and B. J. Bachman, J. Vac. Sci. Technol., A7, 2992 (1989).
R. G. Nuzzo, Y. R. Wong and G. P. Schwartz, Langmuir, 3, 1136 (1987).
S. Contarini, J. A. Schultz, S. Tachi, Y. S. Jo and J. W. Rabalais, Appl. Surface Sci., 28, 291 (1987).
L. P. Buchwalter and A. I. Baise, in “Polyimides: Synthesis, Characterization and Applications”, K. L. Mittal, editor, Vol, 1 p. 537, Plenum, New York, (1984).
S. A. Chambers, V. A. Loebs and K. K. Chakravorty, J. Vac. Sci. Technol., A.8., 875 (1990).
W. E. Vanderlinde and A. L. Ruoff, J. Vac. Sci. Technol., B6, 1621 (1988).
P. S. Ho, Appl. Surface Sci., 41, 559 (1989) and references therein.
C. Chang, Y. Kim and A. G. Schrott, J. Vac. Sci. Technol., A8., 3304 (1990).
X-ray photoelectron spectroscopy manual, Perkin Elmer, 1990.
D. Briggs, Appl. Surface Sci., 6, 188 (1980).
D. T. Clark and A. Dilks, J. Polym. Sci., Polym. Chern. Ed., 17, 957, (1979)
D. T. Clark, W. J. Feast, D. Kilcast and W. K. R. Musgrave, J. Polym.Sci., 11, 389 (1973).
L. P. Buchwalter, B. D. Silverman and A. R. Rossi, J. Vac. Sci. Technol., A5, 226 (1987).
Author information
Authors and Affiliations
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 1992 Springer Science+Business Media New York
About this chapter
Cite this chapter
Saha, N.C., Chang, LH. (1992). Oxygen Plasma Treatment of Fluorinated Polyimide: An X-Ray Photoelectron Spectroscopy Study. In: Mittal, K.L. (eds) Metallized Plastics 3. Springer, Boston, MA. https://doi.org/10.1007/978-1-4615-3416-7_18
Download citation
DOI: https://doi.org/10.1007/978-1-4615-3416-7_18
Publisher Name: Springer, Boston, MA
Print ISBN: 978-1-4613-6510-5
Online ISBN: 978-1-4615-3416-7
eBook Packages: Springer Book Archive