Mathematical Models in Integrated-Circuit Manufacturing: A Review

  • Christopher S. Tang
  • Lieven Demeester


In this paper, we review mathematical models that have been developed for improving the performance of a wafer fab that faces yield uncertainty and system uncertainty such as machine failures. Specifically, we focus on models that deal with the design and operational issues arising from a wafer fab. We classify these models into two main categories: yield models and wafer-design models. These models address different strategic and planning issues that related to yield uncertainty and system uncertainty in IC manufacturing, and can be used to predict system performance of a specific production plan or system design. Besides the predictive power, these models can be used for optimization.


Point Defect Defect Density Chip Size Wafer Fabrication Yield Uncertainty 
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Copyright information

© Springer Science+Business Media New York 1993

Authors and Affiliations

  • Christopher S. Tang
    • 1
  • Lieven Demeester
    • 2
  1. 1.Anderson Graduate School of ManagementUniversity of California, Los AngelesLos AngelesUSA
  2. 2.Anderson Graduate School of ManagementUniversity of California, Los AngelesLos Angeles90024

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