Electron Emission from Silicon Induced by Bombardment with Oxygen Ions
A multitechnique SIMS-Auger instrument, described in detail elsewhere (Maydell et al, 1992), comprises of a complete Auger electron spectrometer incorporated into a quadrupole based secondary-ion mass spectrometer. The instrument uses ion-induced electron emission for ‘viewing’ the sample surface. The intensity of low-energy electrons generated by the primary ionbeam, which scans the sample surface at TV frequency, is displayed on a TV monitor in a way similar to the acquiring of a secondary-electron image with a scanning electron microscope. The intensity of electron emission depends on the degree of oxidation of the surface, as well as on the nature and energy of the primary ions.
KeywordsDioxide Magnesium Argon Auger Extraction Column
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- Hagstrum H.D., 1977, Ch. I in Inelastic Ion-surface Collisons, Eds. N.H. Tolk, J.C. Tully and C.W. Heiland, Academic Press Inc., N.Y. San FranciscoGoogle Scholar
- Maydell E.A., Fabian D.J. and Bolouri H., 1992 J.Phys.E (in print).Google Scholar
- Maydell E.A., 1992 (in preparation — for Surface Sci.).Google Scholar
- Maydell E.A., 1992b (in preparation — for Surface Sci.).Google Scholar
- Sroubek Z. 1988, SIMS IV Conf. Proc. Eds. Benninghoven A., Huber A.M. and Werner H.W., J. Wiley and Sons, Chichester, NY, Brisbane, Toronto, p 17–24.Google Scholar
- Webb R.P., 1991, University of Surrey, private information.Google Scholar
- Wilson I.H. and Webb R.P. 1986, Invited Paper in Proc. of Third Int. Conf on Radiation Effects in Insulators, I.H.Wilson and R.P.Webb Eds., Gordon and Breach Science Publishers, p.765.Google Scholar
- Xu F. and Bonanno A., 1992, Surf. Sci. Lett, (in print).Google Scholar
- Xu F., Mandarino N., Zoccali P. and Bonanno A, 1992, Phys. Rev. A (in print).Google Scholar