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Integrated Optics, Microstructures, and Sensors pp 365–392Cite as

Comparison Between Electric, Magnetic, and Optical Sensors

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Part of the book series: The Springer International Series in Engineering and Computer Science ((SECS,volume 332))

Abstract

In this chapter we present a comparative study of different sensing means that are used with comparable sensing shells to detect small displacement/force and accelerations. We consider the cantilever beam shown in Figure 1 as the sensor shell commonly used by all the sensors discussed in the present chapter. It is a simple silicon cantilever beam that is fabricated as discussed in section II. The sensing mean translates the displacement of the cantilever beam to a signal. The sensor shell we have described is used in a variety of sensors including atomic force and scanning tunneling microscopes.

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Authors and Affiliations

  1. Department of Electrical Eng. and Applied Physics, Case Western Reserve University, Cleveland, Ohio, 44106, USA

    A. Garcia-Valenzuela & M. Tabib-Azar

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  1. A. Garcia-Valenzuela
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  2. M. Tabib-Azar
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Garcia-Valenzuela, A., Tabib-Azar, M. (1995). Comparison Between Electric, Magnetic, and Optical Sensors. In: Integrated Optics, Microstructures, and Sensors. The Springer International Series in Engineering and Computer Science, vol 332. Springer, Boston, MA. https://doi.org/10.1007/978-1-4615-2273-7_15

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  • DOI: https://doi.org/10.1007/978-1-4615-2273-7_15

  • Publisher Name: Springer, Boston, MA

  • Print ISBN: 978-0-7923-9621-5

  • Online ISBN: 978-1-4615-2273-7

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