Abstract
The performance of a microelectronic device is critically dependent on its structure and composition. Since the manufacture of the more complicated devices involves hundreds of operations, each individual manufacturing step must be controlled within very small tolerances to produce a large percentage of devices with good performance, i.e., there must be an economically meaningful product yield. The procedures defined in the other chapters of this book are intended to monitor and control these manufacturing operations. When these procedures are able to detect a problem, but not identify it, a more detailed analysis is needed.
This is a preview of subscription content, log in via an institution to check access.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
Preview
Unable to display preview. Download preview PDF.
References
Anderson, R. 1990. Specimen Preparation for Transmission Electron Microscopy. Pittsburgh: Materials Research Society.
Anderson, R., Benedict, J., Henry, B., and Martinek, K. 1991. Unpublished results.
Bergin, B., and Klymko, N. 1991. Unpublished results.
Carlson, Thomas A. 1975. Photoelectron and Auger Spectroscopy. New York: Plenum.
Carr, Timothy W. 1977. Thin Solid Films. Vol. 45, p. 115.
Cullity, B. D. 1978. Elements of X-Ray Diffraction 2nd ed. Reading, MA: 1978.
DeHaven, P. W., Goldsmith, C. C., and Nunes, T. L. 1991. The Rigaku J. Vol. 8, No. 2.
Englert, Th., Abstreiter, G., and Pontcharra, J. 1980. Solid State Electronics Vol. 23, No. 31.
Gaarenstroom, S. W. 1982. J. Vac. Sci. Technol. Vol. 20, p. 458.
Gignac, L. 1991. Unpublished results.
Griffiths, P. R., and de Haseth, J. A. 1986. Fourier Transform Infrared Spectrometry. New York: John Wiley & Sons.
Falcon, D., and Scheuer, A. 1991. Unpublished results.
Flitsch, R. 1991. Unpublished results.
Flitsch, R., and Shih, D.-Y. 1990. J. Vac. Sci. Technol. Vol. A8, No. 3, p. 2376.
Goldsmith, C. C., and Noyan, I. C. 1991. To be published.
Goldstein, J. I., Newbury, D. E., Echlin, P., Joy, D. C., Fiori, C., and Lifshin, E. 1981. Scanning Electron Microscopy and X-Ray Microanalysis. New York: Plenum.
Hirsch, P. B., Howie, A., Nicholson, R. B., Pashley, D. W., and Whalen, M. J. 1977. Electron Microscopy of Thin Crystals 2nd ed. New York: Krieger.
Hren, J. J., Goldstein, J. I., and Joy, D. C., eds. 1979. Introduction to Analytical Electron Microscopy. New York: Plenum.
Kvitek, R. J. 1991. Unpublished results.
Needham, C. 1991. Unpublished results.
Noyan, I. C., and Cohen, J. B. 1987. Residual Stress New York: Springer-Verlag.
Ronsheim, P. A., Cunningham, B., and Dupuis, M. D. 1991. J. Appl. Phys. Vol. 69, p. 495.
Siegbahn, K., Nordling, C., Fahlman, A., Nordberg, R., Hamrin, K., Hedman, J., Johansson, G., Bergmark, T., Karlsson, S.-E., Lindgren, I., Lindberg, B. 1967. ESCA Uppsala: Almqvist & Wiksells Boktryckeri AB.
Small, H. 1989. Ion Chromatography New York: Plenum.
Smith, A. L. 1979. Applied Infrared Spectroscopy New York: John Wiley & Sons.
Smith, P. J., Edel, A., and Cunningham, B. 1991. Unpublished results.
Spaulding, E. 1991. Unpublished results.
Spence, J. C. H. 1981. Experimental High-Resolu- tion Electron Microscopy. Oxford: Clarendon.
Thompson, M., Baker, M. D., Christie, A., and Tyson, J. F. 1985. Auger Electron Spectroscopy New York: John Wiley & Sons.
Vickerman, J. C., Brown, A., and Reed, N. M., eds. 1989. Secondary Ion Mass Spectrometry: Principles and Applications New York: Oxford University Press.
White, G., and Lewis, R. 1991. Unpublished results.
Wildman, H. S., and Gignac, L. 1991. Unpublished results.
Willard, H. H., Merritt, L. L. Jr., and Dean, J. A. 1974. Instrumental Methods of Analysis New York: D. Van Nostrand.
Zalar, A. 1990. Thin Solid Films Vol. 193, No. 194, p. 258.
Author information
Authors and Affiliations
Editor information
Rights and permissions
Copyright information
© 1993 Springer Science+Business Media New York
About this chapter
Cite this chapter
Smith, P.J. (1993). Materials and Chemical Analysis of Electronic Devices. In: Landzberg, A.H. (eds) Microelectronics Manufacturing Diagnostics Handbook. Springer, Boston, MA. https://doi.org/10.1007/978-1-4615-2029-0_14
Download citation
DOI: https://doi.org/10.1007/978-1-4615-2029-0_14
Publisher Name: Springer, Boston, MA
Print ISBN: 978-1-4613-5840-4
Online ISBN: 978-1-4615-2029-0
eBook Packages: Springer Book Archive