Abstract
The toolbox of nanofabrication technologies that has developed as a result of microelectronic needs has given researchers an unprecedented capability to design and construct quantum effect and mesoscopic device structures. The subsequent turning point in the understanding of nanometer scale electronic transport was the development of reliable fabrication techniques on the nanometer scale. Laboratories around the world can now controllably impose additional lateral dimensions of quantum confinement on 2D systems with length scales approaching those of epitaxial lengths in the growth direction. The achievement of quantum wires, dots, and Coulomb blockade structures present near-to ultimate limit electronic systems to the experimentalist.
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© 1995 Springer Science+Business Media New York
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Reed, M.A., Sleight, J.W. (1995). Fabrication of Nanoscale Devices. In: Ferry, D.K., Grubin, H.L., Jacoboni, C., Jauho, AP. (eds) Quantum Transport in Ultrasmall Devices. NATO ASI Series, vol 342. Springer, Boston, MA. https://doi.org/10.1007/978-1-4615-1967-6_4
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DOI: https://doi.org/10.1007/978-1-4615-1967-6_4
Publisher Name: Springer, Boston, MA
Print ISBN: 978-1-4613-5809-1
Online ISBN: 978-1-4615-1967-6
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