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Abstract

Negative ion-containing plasmas often appear in plasma processing such as deposition and etching, etc., and also in the upper atmosphere (D-layer) as a natural state. In these cases, an almost electron-free state is realized. Compared to the usual plasmas with electrons and positive ions where their mass ratio is far from unity, plasmas with electronegative gases have different properties and applications, as summarized below.

Keywords

Probe Characteristic Target Section Magnetic Filter Iodine Pressure Optogalvanic Effect 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer Science+Business Media New York 1994

Authors and Affiliations

  • H. Amemiya
    • 1
  1. 1.The Institute of Physical and Chemical Research (RIKEN)Hirosawa, Wako, SaitamaJapan

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