Abstract
Vapor phase lubricants have been studied for well over 40 years, generally within the context of macroscopic system performance. Nonetheless, they may well prove to be of critical importance to the tribological performance of MEMS devices, since the vapor phase may ultimately prove to be an effective, and perhaps exclusive, means to deliver and/or replenish lubricants. With the intent of developing a realistic laboratory test set-up for actual MEMS contacts, we have combined a Scanning Tunneling Microscope (STM) with a Quartz Crystal Microbalance (QCM). The STM-QCM allows unique and detailed investigations of the simple nanomechanical system formed by a contacting tip and surface. Both STM images of the contact and the response of the QCM are monitored throughout the course of the measurements, which are performed in realistic sliding conditions of over 1 m/s. We report here on both (vapor phase) lubricated and non-lubricated contact.
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Borovsky, B., Abdelmaksoud, M., Krim, J. (2003). STM-QCM Studies of Vapor Phase Lubricants. In: Hsu, S.M., Ying, Z.C. (eds) Nanotribology. Springer, Boston, MA. https://doi.org/10.1007/978-1-4615-1023-9_26
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DOI: https://doi.org/10.1007/978-1-4615-1023-9_26
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